식각장치
식각장치 Images
RIE SYSTEM
| LAY-OUT | ITEM | DESCRIPTION |
|---|---|---|
 |
System Composition | Process Module |
| Substrate Size | Max. 200x200mm, 1set | |
| Plasma Source | RF Power Supply |
ICP-RIE SYSTEM
| LAY-OUT | ITEM | DESCRIPTION |
|---|---|---|
 |
System Composition | Process Module |
| Substrate Size | Max. 200x200mm, 1set | |
| Plasma Source | RF Power Supply |
