엘에이티

진공증착장비(SPUTTER / EVAPORATOR / CVD)

진공증착장비 Images
MAGNETRON SPUTTERING SYSTEM
LAY-OUT ITEM DESCRIPTION
System Composition Process Module + Load-lock(OPTION)
Substrate Size 2~6inch Si Wafer 1Set
Gun Size 2~16inch Magnetron
Deposition Direction Up or Downward
Substrate Temperature ~Max. 500℃
Bias Unit DC Bias Unit
Sputtering Source DC Power : ~1KW @ Noise Filter
RF Power : ~3KW @ Auto Matching
Substrate Treatment Load-lock Chamber
Plasma Treatment Unit(OPTION)
SPUTTERING SYSTEM
LAY-OUT ITEM DESCRIPTION
System Composition Process Module + Load-lock
Substrate Size 12inch Si Wafer 1Set
Gun Size 16inch Magnetron
Deposition Direction Up or Downward
Substrate Temperature ~500℃
Sputtering Source DC Power : ~5KW @ Pulsed
Substrate Treatment Load-lock Chamber
Plasma Treatment Unit(OPTION)
Heating unit(OPTION)
E-Beam & Thermal Evaporating System Images
THERMAL EVAPORATING SYSTEM
LAY-OUT ITEM DESCRIPTION
System Composition Process Module + Load-lock(OPTION)
Substrate Size 6inch Wafer 1Set
Deposition Direction Upward
Substrate Temperature ~Max. 500℃
Boat ~4EA
E-BEAM EVAPORATING SYSTEM
LAY-OUT ITEM DESCRIPTION
System Composition Process Module + Load-lock(OPTION)
Substrate Size 6inch Wafer 1Set
Deposition Direction Upward
Substrate Temperature ~Max. 500℃
E-Beam Source DC Power : ~15KW
Chemical Vapor Deposition System Images
INDUCTIVE COUPLING PLASMA-CVD SYSTEM
LAY-OUT ITEM DESCRIPTION
System Composition Process Module + Load-lock(OPTION)
Substrate Size 12inch Wafer 1Set
Deposition Direction Upward
Substrate Temperature ~Max. 900℃
Plasma Source RF Power Supply
PLASMA ENHANCED CVD SYSTEM
LAY-OUT ITEM DESCRIPTION
System Composition Process Module + Load-lock(OPTION)
Substrate Size ~6inch Wafer 1Set
Deposition Direction Downward
Substrate Temperature ~Max. 500℃
Plasma Source RF Power : ~1KW @ Auto Matching
THERMAL CVD SYSTEM
LAY-OUT ITEM DESCRIPTION
System Composition Process Module + Load-lock(OPTION)
Substrate Size ~6inch Wafer 1Set
Deposition Direction Downward
Substrate Temperature ~Max. 1100℃
Plasma Source RF Power : ~1KW @ Auto Matching